Automatic Handling
Description
H-Square Corporation is a world leading equipment supplier supporting the semiconductor industry, Opto/LED, MEMS, flat panel display, photovoltaics, hard disk drive and medical electronics industries.
The versatile wafer sorter uses the core of the exclusive patented components. One machine can be compatible with different sizes, thickness or materials of wafers. It takes only one hour to change size. Available FOUP, FOSB, SMIF and cassette. Its high sub-100um precision handling and aligning allow equipment makers, especially inspection OEM, to improve its tool performance.
Economical, automatic single wafer transfer systems. Engineered for production, metrology, R&D, test-assembly packaging, and application labs to move wafers between two SEMI compliant process, shipping or metal cassettes. The Wafer Mover offers a simple, safe method design for transferring single wafers between two cassettes in a RECIPE or MANUAL mode of operation. A safe low contact wafer mapping end-effector scans each cassette and detects wafers for safe accurate wafer movements.
The Micro/Macro wafer inspection loader provides optional edge grip aligner that can prevent any contamination generated from the contact of front and back side of wafer. The end effector’s constant monitored gripping force assure any fragile wafer’s safety during picking and flipping. There is a tilt rotation station designed for special wafers, it grabs only at the exclusion zone to free rotation and 245˚ tilt.
Table top automatic notch finder/escalator aligns and escalates wafers 0.200» (“)steps for ID mark reading. Cost-effective design provides full-lot wafer tracking at a fraction of the cost of fully automated OCR systems.
H-Square’s automatic AWT and AVT bulk transfer tools safely mass transfer wafers between two SEMI compliant high, or low profile process, shipping, or metal cassettes. Safety sensors insure the cassettes are loaded correctly and wafers are transferred consistently. The AVT vertical transfer stages can be configured to accept quartz, graphite, silicon-carbide, or clamshell type tray carriers.
Automatic M200 (200mm cassette) and RSP200 (reticle) SMIF openers provide easy access to substrates stored inside minienvironment pods. H-Square’s automated openers unlock, open and store the pod lid with minimal operator involvement. Simple one button operation. Openers are compatible with standard M200 and RSP200 pod designs. Smooth, reliable lift automation for reliability and cleanliness. For the SMIFPO8 (M200) version please specify the desired orientation of the pod when ordering.
Table-top automatic 300mm FOUP door opener. The AFO unlocks, removes and stores the FOUP door when accessing the wafers inside a FOUP. A rotating base mechanism below the FOUP allows for 360 degree rotation to position the open FOUP in the best ergonomic access position. Commonly installed at FOUP wash stations to disassemble and reassembly pods.