For all kinds of machine systems in semiconductor, LCD panel and optoelectronic industry, the monitoring system is designed in the form of “plug-in” sensor, designed according to the requirements of the client, and monitored without affecting the operation of the machine system.
● It can be connected with CIM, let the user use the remote control function to query the Office Connection Server and upload the data to SPC or FDC.
● The machine monitoring project includes vibration, speed, pressure, flow and temperature monitoring.
Vibration monitoring system
- • After the Vibration Sensor is installed, use a computer for FFT conversion (Fourier Transform) to find the vibration characteristic value of this pump (or device).
• Write the vibration signature value to the Sensor and the Sensor will send the vibration signature value to the Signal Converter after each measurement.
• The Signal Converter organizes the vibration signature values and sends them to the FDC via a ring network.
• After the PC writes the vibration signature value to the Sensor, it can be removed.