Silicon Carbide (SiC)
Description
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Overview
SiC material, with strong covalent bond, has high thermal conductivity and hardness compared with other ceramic materials and excellent plasma resistance, oxidation resistance, wear resistance, corrosion resistance, heat stability, and thermal shock resistance.
With no particle generated during the semiconductor processes, it is an excellent material for semiconductor manufacturing equipment or parts.
In line with the recent finezation of line width in semiconductor process for high degree of integration, high capacity plasma has got to be needed and accordingly the parts for dry etching process are required to have excellent plasma resistance and extended lifetime.
As a replacement for silicon, quartz, and alumina which have been most used in semiconductor processes, the portion of SiC(silicon carbide) parts is rapidly increasing.
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Feature
