| PVD/CVD Heater Repair, PVD MCA ESC and HDP ESC Repair, LAM and AMAT ETCH ESC Repair, Implanter Ion Implanter Component Rebuild, Semiconductor Bulb (RTP/EPI), Gate/Slit Valve and Throttle Valve Repair, Pump Vacuum Pump repair.
● AMAT 200mm Endura PVD machine with Heater Overhaul repair
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| A101 Heater |
HTHU Heater |
Standard Heater |
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| PN:0010-21246 |
PN:001067152 |
PN:0010-70254 |
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● 200mm AMAT Centura CVD Heater Overhaul Repair
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CVD Wxz Heater
PN: 0010-11491 |
CVD Txz Heater
PN: 0010-11997 |
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● 200mm/ 300mm AMAT CVD HDP ESC Overhaul Repair
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12”CVD HDP ESC
PN: 0040-48594 |
8”CVD HDP ESC
PN: 0040-18219 |
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● AMAT 200mm MCA ESC (Electro-Static Chuck) Overhaul Repair
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SNNF Type
PN: 0010-01286
0010-17831 |
Low Temp
PN: 0010-12516
0010-22412 |
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● AMAT 300mm MCA ESC (Electro-Static Chuck) Overhaul Repair
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High Temp
PN: 0010-27430
0010-23066 |
Low Temp
PN: 0010- 07815
0010- 22985 |
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● ESC (Electro-Static Chuck) Overhaul repair for LAM and AMAT Etcher etching machines
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8 ”LAM 281 ESC
PN: 718-094523-281 |
8” LAM 508ESC
PN: 839-440462-508 |
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12 ”LAM 324/328 ESC
PN: 839–019090–324
839–019090–328 |
12 ”LAM 374 ESC
PN: 839-019090-374
839-019090-608 |
12 "AMAT DPS G5 ESC
PN: 0041-26723 |
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● 200mm/300mm AMAT Implanter VIISTA ASS'Y Parts Maintenance Type
| Model |
P/N |
Description |
Remark |
| VIISTA80 |
E11025070 |
MANIPULATOR ASS'Y |
NOT INCLUDED FEEDTHRU |
| VIISTA810 |
E11293500 |
MANIPULATOR ASS'Y |
NOT INCLUDED FEEDTHRU |
| VIISTA80 / 810 |
E11115361 |
X-TILT ASS'Y |
NOT INCLUDED MOTOR |
| VIISTA80 |
E11094490 |
PROFILER ASS'Y |
NOT INCLUDED MOTOR |
| VIISTA810 |
E11128550 |
PROFILER ASS'Y |
NOT INCLUDED MOTOR |
| VIISTA810 |
E11284070 |
FARADAY CUP ASS'Y |
NOT INCLUDED HEAD GRAPHITE |
| VIISTA80 / 810 |
E11305530 |
CARTRIDGE ASS'Y |
E11482820/E11141186/E11141182…Etc, all cartridge a’ssy possible for overhaul. |
| VIISTA80 / 810 |
E11022721/2 |
ORIENT AASY(Modify) |
NOT INCLUDED MOTOR |
| VIISTA810 |
E11298170 |
ROTARY MASS SLIT |
Replace UNION & FEEDTHRU with new |
| VIISTA80 / 810 |
E11141163 |
ROPLAT ASSY+CARTRIDGE |
NOT INCLUDED X-TILT MOTOR &SI COATING |
● VIISTA80 與 VIISTAHC, VIISTAHCP, VIISTAHCS, VIISTA TRIDENT 使用相同零組件
● VIISTA810 與 VIISTA810XE/XER,VIISTA900XPT and VIISTA3000HP/XP 使用相同零組件
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● 300mm AMAT Implanter VIISTA HC/Trident/MC 離子植入機 零組件維修
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| VIISTA MC Mass Slit |
VIISTA HC/Trident/MC Cartridge |
VIISTA HC/Trident/MC Roplat Tilter |
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| VIISTA HC/MC LED Orient |
VIISTA HC/Trident/MC Elevator |
VIISTA 80/810 Manipulator |
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● 200mm Varian E220/E500HP 離子植入機 零組件 維修
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Manipulator
PN: 17037753
17037754 |
Roplat
PN: 11120780
11283440
11049740 |
Set-up Cup
PN: 11029490 |
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● 200mm VIISTA 80/810 離子植入機零組件 維修
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Manipulator
PN: E111093752 (VIISTA 80)
E11293500 (VIISTA 810) |
Cartridge
PN:11141182 |
Rotating Mass Slit
PN: E11094423
E11298170 |
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| ● Semiconductor RTP rapid heating / annealing, and EPI epitaxial equipment bulb Lamp
AMAT RTP Rapid Temperature / Annealing Lamp Models and Specifications
AMAT EPI Lattice Equipment with Lamp Models and Specifications
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| ● SMC / VAT Slit valve, Gate valve Overhaul Repair
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| ● SMC / VAT Slit valve, Gate valve Overhaul Repair
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| ● V-TEK Slit valve, Gate valve Overhaul repair
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| ● Throttle Valve Overhaul Repair
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| ● Brooks CTI On-Board Type Overhaul
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| ● Brooks CTI On-Board IS Type Overhaul
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