Parts for Semiconductor

Semiconductor

• Product Overview

1) CVD - Bellows, ESC, Spindle, Process Kits, ALN Heater
2) PVD - Bellows, Metal Heater, ESC
3) ETCH – Bellows, Special Gasket, ESC, Si Cathode & Edge Ring
4) PHOTO – Chuck (ASML, Nikon, Cannon)
5) IMP – Sub Ass’y (Roplate, Tilter, Mass Slit, etc.)

• Features

OEM & Localization 2^nd source

• Applications